Noise filtering for accurate measurement of line edge...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 11 Vol. 34; Iss. 6

Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images

Li, Dehua, Guo, Rui, Lee, Soo-Young, Choi, Jin, Kim, Seom-Beom, Park, Sung-Hoon, Shin, In-Kyun, Jeon, Chan-Uk
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4968184
Date:
November, 2016
File:
PDF, 3.77 MB
english, 2016
Conversion to is in progress
Conversion to is failed