Chamber wall interactions with HBr/Cl 2 /O 2 plasmas
Srivastava, Ashutosh K., Ohashi, Tomohiro, Donnelly, Vincent M.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4920933
Date:
July, 2015
File:
PDF, 3.59 MB
english, 2015