From molecules to particles in silane plasmas

Pure & Applied Chemistry 1996 / 01 Vol. 68; Iss. 5

From molecules to particles in silane plasmas

Howling, A. A., Courteille, C., Dorier, J.-L., Sansonnens, L., Hollenstein, Ch.
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Volume:
68
Language:
english
Journal:
Pure and Applied Chemistry
DOI:
10.1351/pac199668051017
Date:
January, 1996
File:
PDF, 634 KB
english, 1996
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