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A differential Michelson interferometer with orthogonal single frequency laser for nanometer displacement measurement
Yan, Liping, Chen, Benyong, Wang, BinVolume:
28
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aa5919
Date:
April, 2017
File:
PDF, 794 KB
english, 2017