Spectroscopic investigation of the electronic structure of thin atomic layer deposition HfO 2 films
Corrêa, Silma Alberton, Brizzi, Simone, Schmeisser, DieterVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935338
Date:
January, 2016
File:
PDF, 1.42 MB
english, 2016