SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics - High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler
Qian, Shinan, Idir, Mourad, Cocco, Daniele, Xiao, Tiqiao, Yamauchi, Kazuto, Xu, Xudong, Ma, Shuang, Shen, Zhengxiang, Huang, Qiushi, Wang, ZhanshanVolume:
9687
Year:
2016
Language:
english
DOI:
10.1117/12.2243152
File:
PDF, 534 KB
english, 2016