SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics - Control of lateral thickness gradients of EUV/soft x-ray multilayer on curved substrates
Qian, Shinan, Idir, Mourad, Cocco, Daniele, Xiao, Tiqiao, Yamauchi, Kazuto, Yu, Bo, Jin, Chun-shui, Yao, ShunVolume:
9687
Year:
2016
Language:
english
DOI:
10.1117/12.2246160
File:
PDF, 1.30 MB
english, 2016