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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics - Progress in upgrading a long trace profiler at NSRRC
Qian, Shinan, Idir, Mourad, Cocco, Daniele, Xiao, Tiqiao, Yamauchi, Kazuto, Wang, Duan-Jen, Lin, Shang-Wei, Perng, Shen-YawVolume:
9687
Year:
2016
Language:
english
DOI:
10.1117/12.2247664
File:
PDF, 1.72 MB
english, 2016