Simple realization of efficient barrier performance of a single layer silicon nitride film via plasma chemistry
Lee, Jun Suk, Sahu, Bibhuti Bhusan, Han, Jeon GeonVolume:
18
Year:
2016
Language:
english
Journal:
Phys. Chem. Chem. Phys.
DOI:
10.1039/c6cp06722k
File:
PDF, 3.04 MB
english, 2016