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Growth of HfO 2 /TiO 2 nanolaminates by atomic layer deposition and HfO 2 -TiO 2 by atomic partial layer deposition
Hernández-Arriaga, H., López-Luna, E., Martínez‐Guerra, E., Turrubiartes, M. M., Rodríguez, A. G., Vidal, M. A.Volume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4975676
Date:
February, 2017
File:
PDF, 5.52 MB
english, 2017