Optimization of UV-assisted wet oxidation of GaAs

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 01 Vol. 35; Iss. 1

Optimization of UV-assisted wet oxidation of GaAs

Gucmann, Filip, Kúdela, Róbert, Rosová, Alica, Dobročka, Edmund, Mičušík, Matej, Gregušová, Dagmar
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4974196
Date:
January, 2017
File:
PDF, 2.39 MB
english, 2017
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