A study of partial layout of adhesive on the thermal drift...

International Journal of Modern Physics B 2017 / 03 Vol. 31; Iss. 7

A study of partial layout of adhesive on the thermal drift of MEMS capacitive accelerometers

Peng, Peng, Zhou, Wu, Yu, Huijun, Hao, Qu, Peng, Bei, He, Xiaoping
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Volume:
31
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979217410065
Date:
March, 2017
File:
PDF, 764 KB
english, 2017
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