Sub-100 nm features seamless roller mold using anodization...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 09 Vol. 34; Iss. 5

Sub-100 nm features seamless roller mold using anodization and atomic layer deposition, for roll-to-roll nanoimprint lithography

Tan, Lee Kheng, Ho, Audrey Yoke Yee
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4962669
Date:
September, 2016
File:
PDF, 1.20 MB
english, 2016
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