Industrial-scale sputter deposition of molybdenum oxide...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Pachlhofer, Julia M., Martín-Luengo, Aitana Tarazaga, Franz, Robert, Franzke, Enrico, Köstenbauer, Harald, Winkler, Jörg, Bonanni, Alberta, Mitterer, Christian
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4973214
Date:
March, 2017
File:
PDF, 2.74 MB
english, 2017
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