Structure and electrical properties of pure and...

Materials & Design 2017 / 04 Vol. 120

Structure and electrical properties of pure and yttrium-doped HfO 2 films by chemical solution deposition through layer by layer crystallization process

Liang, Hailong, Xu, Jin, Zhou, Dayu, Wang, Xuexia, Liu, Xiaohua, Chu, Shichao, Liu, Xiaoying
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Volume:
120
Language:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2017.02.019
Date:
April, 2017
File:
PDF, 1.29 MB
english, 2017
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