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[ASME ASME 2003 International Mechanical Engineering Congress and Exposition - Washington, DC, USA (November 15–21, 2003)] Microelectromechanical Systems - Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing (FOLPS)
Noh, Hong-Seok, Kim, Sangkyung, Hesketh, Peter J., Mao, Hua, Wong, LidVolume:
2003
Year:
2003
Language:
english
DOI:
10.1115/IMECE2003-42441
File:
PDF, 556 KB
english, 2003