Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 11 Vol. 33; Iss. 6
Topography-free sample for thermal spatial response measurement of scanning thermal microscopy
Ge, Yunfei, Zhang, Yuan, Weaver, Jonathan M. R., Zhou, Haiping, Dobson, Phillip S.Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4933172
Date:
November, 2015
File:
PDF, 4.76 MB
english, 2015