Characterization of a cold cathode Penning ion source for...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 03 Vol. 34; Iss. 2

Characterization of a cold cathode Penning ion source for the implantation of noble gases beneath 2D monolayers on metals: Ions and neutrals

Cun, Huanyao, Spescha, Annina, Schuler, Adrian, Hengsberger, Matthias, Osterwalder, Jürg, Greber, Thomas
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4939507
Date:
March, 2016
File:
PDF, 1.58 MB
english, 2016
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