Effects of substrate temperature on the degradation of RF...

Materials Science in Semiconductor Processing 2017 / 06 Vol. 63

Effects of substrate temperature on the degradation of RF sputtered NiO properties

Ahmed, Anas A., Devarajan, Mutharasu, Afzal, Naveed
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Volume:
63
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.02.017
Date:
June, 2017
File:
PDF, 1006 KB
english, 2017
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