[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Analytical challenges in next generation packaging/assembly
Dias, Rajen, Goyal, Deepak, Tandon, Shalabh, Samuelson, GayYear:
1998
Language:
english
DOI:
10.1063/1.56847
File:
PDF, 782 KB
english, 1998