Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 05 Vol. 33; Iss. 3
![](/img/cover-not-exists.png)
Interactions of higher order tip effects in critical dimension-AFM linewidth metrology
Dixson, Ronald, Ng, Boon Ping, Bonnaud, Xavier, Orji, NdubuisiVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4919090
Date:
May, 2015
File:
PDF, 1.66 MB
english, 2015