High-k oxides by atomic layer deposition—Applications in...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 03 Vol. 35; Iss. 2

High-k oxides by atomic layer deposition—Applications in biology and medicine

Godlewski, Marek, Gierałtowska, Sylwia, Wachnicki, Łukasz, Pietuszka, Rafał, Witkowski, Bartłomiej S., Słońska, Anna, Gajewski, Zdzisław, Godlewski, Michał M.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4974314
Date:
March, 2017
File:
PDF, 559 KB
english, 2017
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