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Manufacturing Technology of the Sensitive Elements for Gas Sensors Based on Dielectric Membrane Structures
Veselov, D.S., Voronov, Yu.A.Volume:
799-800
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.799-800.919
Date:
October, 2015
File:
PDF, 327 KB
english, 2015