Self-limiting CVD of a passivating SiO x control layer on...

Surface Science 2017 / 06 Vol. 660

Self-limiting CVD of a passivating SiO x control layer on InGaAs(001)-(2x4) with the prevention of III-V oxidation

Edmonds, Mary, Wolf, Steven, Chagarov, Evgueni, Kent, Tyler, Park, Jun Hong, Holmes, Russell, Alvarez, Daniel, Droopad, Ravi, Kummel, Andrew C.
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Volume:
660
Language:
english
Journal:
Surface Science
DOI:
10.1016/j.susc.2017.02.006
Date:
June, 2017
File:
PDF, 1.83 MB
english, 2017
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