Reusable High Aspect Ratio 3-D Nickel Shadow Mask

Journal of Microelectromechanical Systems 2017 / 4 Vol. 26; Iss. 2

Reusable High Aspect Ratio 3-D Nickel Shadow Mask

Shandhi, Md. Mobashir Hasan, Leber, Moritz, Hogan, Alexander L., Warren, David J., Bhandari, Rajmohan, Negi, Sandeep
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2654126
Date:
April, 2017
File:
PDF, 10.57 MB
english, 2017
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