Threshold voltage variability induced by spacer- and resist-defined patterning techniques in nanoscale FinFETs
Rathore, Rituraj Singh, Sharma, Rajneesh, Rana, Ashwani K.Volume:
16
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.16.1.013503
Date:
February, 2017
File:
PDF, 6.44 MB
english, 2017