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Threshold voltage variability induced by spacer- and...

Threshold voltage variability induced by spacer- and resist-defined patterning techniques in nanoscale FinFETs

Rathore, Rituraj Singh, Sharma, Rajneesh, Rana, Ashwani K.
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Volume:
16
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.16.1.013503
Date:
February, 2017
File:
PDF, 6.44 MB
english, 2017
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