Using of EM fields during industrial CZ and FZ large...

Using of EM fields during industrial CZ and FZ large silicon crystal growth

Mühlbauer, Alfred, Muiznieks, Andris, Ratnieks, Gundars, Krauze, Armands, Raming, Georg, Wetzel, Thomas
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Volume:
22
Language:
english
Journal:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
DOI:
10.1108/03321640310452222
Date:
March, 2003
File:
PDF, 435 KB
english, 2003
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