Using of EM fields during industrial CZ and FZ large silicon crystal growth
Mühlbauer, Alfred, Muiznieks, Andris, Ratnieks, Gundars, Krauze, Armands, Raming, Georg, Wetzel, ThomasVolume:
22
Language:
english
Journal:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
DOI:
10.1108/03321640310452222
Date:
March, 2003
File:
PDF, 435 KB
english, 2003