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Computational study of the demolding process in nanoimprint...

Computational study of the demolding process in nanoimprint lithography

Takai, Rina, Yasuda, Masaaki, Tochino, Takamitsu, Kawata, Hiroaki, Hirai, Yoshihiko
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4897138
Date:
November, 2014
File:
PDF, 3.05 MB
english, 2014
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