Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 11 Vol. 32; Iss. 6
Computational study of the demolding process in nanoimprint lithography
Takai, Rina, Yasuda, Masaaki, Tochino, Takamitsu, Kawata, Hiroaki, Hirai, YoshihikoVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4897138
Date:
November, 2014
File:
PDF, 3.05 MB
english, 2014