Transmission electron imaging in the Delft multibeam...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 11 Vol. 34; Iss. 6

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Ren, Yan, Kruit, Pieter
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4966216
Date:
November, 2016
File:
PDF, 5.22 MB
english, 2016
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