Wafer-level vacuum-encapsulated rate gyroscope with high...

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Microsystem Technologies 2017 / 1

Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process

Merdassi, Adel, Kezzo, Mohamad Nizar, Chodavarapu, Vamsy P.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-3250-3
Date:
January, 2017
File:
PDF, 2.51 MB
english, 2017
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