3-D Numerical Simulation on Plasma Immersion Ion...

IEEE Transactions on Plasma Science 2017 / 1 Vol. 45; Iss. 1

3-D Numerical Simulation on Plasma Immersion Ion Implantation Batch Treating Process of Bearing Balls

Yu, Yonghao, Wang, Langping, Wang, Xiaofeng, Lu, Yang
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Volume:
45
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2016.2631547
Date:
January, 2017
File:
PDF, 966 KB
english, 2017
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