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3-D Numerical Simulation on Plasma Immersion Ion Implantation Batch Treating Process of Bearing Balls
Yu, Yonghao, Wang, Langping, Wang, Xiaofeng, Lu, YangVolume:
45
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2016.2631547
Date:
January, 2017
File:
PDF, 966 KB
english, 2017