Thermal analysis of extreme ultraviolet pellicle with...

Microelectronic Engineering 2017 / 06 Vol. 177

Thermal analysis of extreme ultraviolet pellicle with metallic coatings

Park, Eun-Sang, Kim, Min-Ha, Hwang, Sollee, Oh, Hye-Keun
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Volume:
177
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.02.017
Date:
June, 2017
File:
PDF, 1.10 MB
english, 2017
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