![](/img/cover-not-exists.png)
MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process
Ge, Chang, Cretu, EdmondVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa5dfb
Date:
April, 2017
File:
PDF, 2.85 MB
english, 2017