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Improved transfer process for fabrication of cantilever with precise air-gap formation
Kanazawa, Shusuke, Kusaka, Yasuyuki, Yamamoto, Noritaka, Ushijima, HirobumiVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.05EB01
Date:
May, 2017
File:
PDF, 694 KB
english, 2017