Revisiting the Removal Rate Model for Oxide CMP

Journal of Tribology 2005 Vol. 127; Iss. 3

Revisiting the Removal Rate Model for Oxide CMP

Sorooshian, Jamshid, Borucki, Leonard, Stein, David, Timon, Robert, Hetherington, Dale, Philipossian, Ara
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Volume:
127
Year:
2005
Language:
english
Journal:
Journal of Tribology
DOI:
10.1115/1.1866168
File:
PDF, 1.22 MB
english, 2005
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