![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing, China (Wednesday 12 October 2016)] Optical Metrology and Inspection for Industrial Applications IV - Calibration of angle-measurement system for direction measurements
Han, Sen, Yoshizawa, Toru, Zhang, Song, Filatov, Yu. V., Bohkman, E. D., Ivanov, P. A., Larichev, R. A., Pavlov, P. A.Volume:
10023
Year:
2016
Language:
english
DOI:
10.1117/12.2245626
File:
PDF, 243 KB
english, 2016