![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Chemical surface treatment of Ge 2 Sb 2 Te 5 thin films for phase change memory application
Lukichev, Vladimir F., Rudenko, Konstantin V., Mikhailova, M. S., Nemtseva, S. Y., Glukhenkaya, V. B., Lazarenko, P. I., Sherchenkov, A. A., Kozyukhin, S. A., Timoshenkov, S. P.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2267157
File:
PDF, 1.08 MB
english, 2016