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Well-defined silicon patterns by imprinting of liquid silicon
Kawajiri, Ryo, Takagishi, Hideyuki, Masuda, Takashi, Kaneda, Toshihiko, Yamazaki, Ken, Matsuki, Yasuo, Mitani, Tadaoki, Shimoda, TatsuyaVolume:
4
Year:
2016
Language:
english
Journal:
J. Mater. Chem. C
DOI:
10.1039/c5tc03684d
File:
PDF, 11.01 MB
english, 2016