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Building of Silicon Sensors by Micromachining of Bulk Silicon and Anodic Bonding
Jakobsen, Henrik, Lapadatu, DanielVolume:
T79
Year:
1999
Language:
english
Journal:
Physica Scripta
DOI:
10.1238/Physica.Topical.079a00032
File:
PDF, 989 KB
english, 1999