The impact of medium frequency pulsed magnetron discharge...

The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters

Wiatrowski, A, Posadowski, W.M
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Volume:
34
Language:
english
Journal:
Materials Science-Poland
DOI:
10.1515/msp-2016-0012
Date:
January, 2016
File:
PDF, 726 KB
english, 2016
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