Influence of AlN buffer layer on growth of AlGaN by HVPE

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physica status solidi (b) 2017 / 02

Influence of AlN buffer layer on growth of AlGaN by HVPE

Fleischmann, Simon, Richter, Eberhard, Mogilatenko, Anna, Weyers, Markus, Tränkle, Günther
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Language:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201600696
Date:
February, 2017
File:
PDF, 603 KB
english, 2017
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