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Studies on Thermal Atomic Layer Deposition of Silver Thin Films
Mäkelä, Maarit, Hatanpää, Timo, Mizohata, Kenichiro, Meinander, Kristoffer, Niinistö, Jaakko, Räisänen, Jyrki, Ritala, Mikko, Leskelä, MarkkuVolume:
29
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b04029
Date:
March, 2017
File:
PDF, 1.77 MB
english, 2017