Dislocation-related photoluminescence in silicon implanted...

Technical Physics Letters 2017 / 1 Vol. 43; Iss. 1

Dislocation-related photoluminescence in silicon implanted with fluorine ions

Sobolev, N. A., Kalyadin, A. E., Sakharov, V. I., Serenkov, I. T., Shek, E. I., Karabeshkin, K. V., Karasev, P. A., Titov, A. I.
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Volume:
43
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785017010126
Date:
January, 2017
File:
PDF, 445 KB
english, 2017
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