AIP Conference Proceedings [American Institute of Physics 5TH NATIONAL CONFERENCE ON THERMOPHYSICAL PROPERTIES: (NCTP‐09) - Baroda (India) (7–9 October 2009)] - Effect of residual stress on modal patterns of MEMS vibratory gyroscope
Dutta, Shankar, Panchal, Abha, Kumar, Manoj, Pal, Ramjay, Bhan, R. K.Volume:
1249
Year:
2010
Language:
english
DOI:
10.1063/1.4945223
File:
PDF, 1.22 MB
english, 2010