ZnO/(Hf,Zr)O 2 /ZnO-trilayered...

Japanese Journal of Applied Physics 2016 / 02 Vol. 55; Iss. 2S

ZnO/(Hf,Zr)O 2 /ZnO-trilayered nanowire capacitor structure fabricated solely by metalorganic chemical vapor deposition

Fujisawa, Hironori, Kuwamoto, Kei, Nakashima, Seiji, Shimizu, Masaru
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.02BC08
Date:
February, 2016
File:
PDF, 1.02 MB
english, 2016
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