Characterization and optimization of ion implantation for high spatial resolution quantum well intermixing in GaAs/AlGaAs superlattices
Younis, Usman, Holmes, Barry M., Hutchings, David C.Volume:
66
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2014140020
Date:
April, 2014
File:
PDF, 887 KB
english, 2014