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Combined Ultrasonic Elliptical Vibration and Chemical Mechanical Polishing of Monocrystalline Silicon
Liu, Defu, Chen, Tao, Yan, Riming, Sahari, B.B., Qin, Q., Das, R.Volume:
82
Year:
2016
Language:
english
Journal:
MATEC Web of Conferences
DOI:
10.1051/matecconf/20168202001
File:
PDF, 1.72 MB
english, 2016