An air gap moderates the performance of nanowire array transistors
Yang, Tong, Mehta, Jeremy S, Mativetsky, Jeffrey MVolume:
28
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aa5f0a
Date:
March, 2017
File:
PDF, 1.19 MB
english, 2017