Fabrication of high quality, thin Ge-on-insulator layers by...

Fabrication of high quality, thin Ge-on-insulator layers by direct wafer-bonding for nanostructured thermoelectric devices

Veerappan, Manimuthu, Mukannan, Arivanandhan, Salleh, Faiz, Shimura, Yosuke, Hayakawa, Yasuhiro, Ikeda, Hiroya
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Volume:
32
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aa5391
Date:
March, 2017
File:
PDF, 2.44 MB
english, 2017
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