[ASME ASME 2014 International Mechanical Engineering Congress and Exposition - Montreal, Quebec, Canada (Friday 14 November 2014)] Volume 10: Micro- and Nano-Systems Engineering and Packaging - Excimer Laser-Machined SU-8 Microstructures for Polydimethylsiloxane (PDMS) Replica Molding
Liu, Kewei, Kim, Yoontae, Noh, Hongseok (Moses)Year:
2014
Language:
english
DOI:
10.1115/IMECE2014-39177
File:
PDF, 1.36 MB
english, 2014